Study on high-speed and compact optical bio-sensor for sample size analysis

Makoto Kamata, Kan Yamada, Yoshihiro Taguchi, Yuji Nagasaka

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

本文言語English
ホスト出版物のタイトル2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版社IEEE Computer Society
2016-September
ISBN(電子版)9781509010356
DOI
出版ステータスPublished - 2016 9 13
イベント21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
継続期間: 2016 7 312016 8 4

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period16/7/3116/8/4

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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