Study on ultra-precision grinding of micro aspherical surface (3rd report) - Micronizing of aspherical surface in inclined rotational grinding

Hirofumi Suzuki, Tsunemoto Kuriyagawa, Katsuo Syoji, Kenji Tanaka, Jiwang Yan, Naoshi Wajima, Katsutoshi Tanaka, Ikkei Miyoshi

研究成果: Article査読

20 被引用数 (Scopus)

抄録

In this study, a new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. In the previous report, the wheel was formed to a precise columnar shape of 0.8 mm in the dismeter by a single crystal diamond truer on the machine. By the developed system, is grinding test of the workpiece of about 0.7 mm radius curvature, the form accuracy of about 0.1 μm P-V and surface roughness of less than 0.03 μm Ry were obtained. Recent trend is the further micronization of aspherical optical components. Therefore in this report micronizing of aspherical surface was examined by the ultra-high speed grinding spindle of 15 × 104 rpm at the maximum rotational rate and micro wheel of about 0.3 mm in radius curvature. In the grinding test, WC (tungsten carbide) molding die of less than 0.3 mm radius curvature was tested and the form accuracy of about 0.1 μm P-V was obtained.

本文言語English
ページ(範囲)1350-1354
ページ数5
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
64
9
DOI
出版ステータスPublished - 1998
外部発表はい

ASJC Scopus subject areas

  • 機械工学

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