This paper demonstrates high-temperature operation of a sub-micron GMR sensor, biased with a vertically integrated hard magnet. In the present Study, fringe fields from vertically integrated CoPt pattern are used for biasing transverse to the short axis of the GMR strip. While, well-defined shape anisotropy in the narrow strip pattern is used for biasing parallel to the short axis. A sputtered Co/Cu multilayer overlaid with CoPt is structured into strip pattern with a width of down to 0.4 μm by electron beam lithography and Ar ion milling. A typical layer structure of the studied samples is [Co(2.0 nm)/Cu(2.0 nm)]/ Ta(8.0 nm)/CoPt(23 nm). The fabricated self-biased GMR strip exhibited superior linear MR response to alternative external fields ranged from 0.4 to 250 Oe at room temperature and 553 K (apparatus limit).
|ジャーナル||IEEE Transactions on Magnetics|
|出版物ステータス||Published - 2001 7 1|
|イベント||8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States|
継続期間: 2001 1 7 → 2001 1 11
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering