Synthesis of a closely packed carbon nanotube forest by a multi-step growth method using plasma-based chemical vapor deposition

Yuichi Yamazaki, Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Shintaro Sato, Mizuhisa Nihei, Makoto Wada, Noriaki Matsunaga, Tadashi Sakai, Yuji Awano

    研究成果: Article査読

    62 被引用数 (Scopus)

    抄録

    We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where the space of 30-40% is filled with MWCNTs. This value is approximately one order of magnitude larger than that of asgrown CNT forest synthesized using conventional methods. The method is applicable even at a spatially restricted region, for example, in trench or via hole, and is available at the growth temperature as low as 450°C.

    本文言語English
    論文番号055002
    ジャーナルApplied Physics Express
    3
    5
    DOI
    出版ステータスPublished - 2010 5 1

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

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