Synthesis of diamond-like hydrocarbon films by atmospheric pressure filamentary dielectric barrier discharge

T. Suzuki, A. Shirakura

研究成果: Conference article

抜粋

Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.

元の言語English
記事番号012046
ジャーナルIOP Conference Series: Materials Science and Engineering
369
発行部数1
DOI
出版物ステータスPublished - 2018 6 12
イベント2018 5th Global Conference on Polymer and Composite Materials, PCM 2018 - Kitakyushu City, Japan
継続期間: 2018 4 102018 4 13

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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