Synthesis of hydrogenated amorphous carbon films with a line type atmospheric-pressure plasma CVD apparatus

Masaki Agemi, Kotaro Kayama, Mayui Noborisaka, Yohei Tachimoto, Akira Shirakura, Tetsuya Suzuki

研究成果: Article

7 引用 (Scopus)

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In this study, hydrogenated amorphous carbon (a-C:H) films were synthesized on polyethylene terephthalate (PET) substrates with a line type atmospheric-pressure plasma chemical vapor deposition (CVD) apparatus. Acetylene and nitrogen mixture gas was used for process gas and a-C:H films having two different thickness were synthesized with varying the C2H2 mixing rates. We investigated the effect of chemical bonding structure on the ultraviolet ray shielding property of the films. The deposition rate increased as a function of the C2H2 mixing rates. Increasing the C2H2 mixing rate from 2.5 to 10% caused an increase in the deposition rates from 13 to 22nm/s. The deposition rate under atmospheric pressure was faster than that of low-pressure plasma CVD (~5-16nm/s). Ultraviolet transmittance of 2-m thick a-C:H film synthesized at the C2H2 mixing rate of 10% on 100-m thick PET substrates ranged from 0 to 3% as the UV wavelength ranged from 310 to 400nm, while that of uncoated PET substrates ranged from 0 to 80%. From the result of X-ray photoelectron spectroscopy (XPS) analysis, the component of sp2-hybridized C, such as CC and CO bonds increased as the C2H2 mixing rate and thickness of a-C:H films increased. A decrease of sp3-hybridized C, such as CC and CO bonds and an increase of sp2-hybridized C bonds lead to an improvement of ultraviolet ray shielding property.

元の言語English
ページ(範囲)2025-2029
ページ数5
ジャーナルSurface and Coatings Technology
206
発行部数7
DOI
出版物ステータスPublished - 2011 12 25

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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