System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato; S. Wakui; T. Mayama; A. Toukairin; H. Takanashi; S. Adachi

System identification of anti-vibration units in semiconductor exposure apparatus

H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi

研究成果: Paper › 査読

抄録

In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

本文言語	English
ページ	1312-1317
ページ数	6
出版ステータス	Published - 1999 12月 1
外部発表	はい
イベント	Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD) - Kohala Coast, HI, USA 継続期間: 1999 8月 22 → 1999 8月 27

Other

Other	Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD)
City	Kohala Coast, HI, USA
Period	99/8/22 → 99/8/27

ASJC Scopus subject areas

制御およびシステム工学

他のファイルとリンク

引用スタイル

Kato, H., Wakui, S., Mayama, T., Toukairin, A., Takanashi, H., & Adachi, S. (1999). System identification of anti-vibration units in semiconductor exposure apparatus. 1312-1317. Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA.

System identification of anti-vibration units in semiconductor exposure apparatus. / Kato, H.; Wakui, S.; Mayama, T. その他.
1999. 1312-1317 Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA.

研究成果: Paper › 査読

Kato, H, Wakui, S, Mayama, T, Toukairin, A, Takanashi, H & Adachi, S 1999, 'System identification of anti-vibration units in semiconductor exposure apparatus', Paper presented at Proceedings of the 1999 IEEE International Conference on Control Applications (CCA) and IEEE International Symposium on Computer Aided Control System Design (CACSD), Kohala Coast, HI, USA, 99/8/22 - 99/8/27 pp. 1312-1317.

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abstract = "In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.",

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AU - Takanashi, H.

AU - Adachi, S.

PY - 1999/12/1

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N2 - In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

AB - In this paper, system identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using subspace method. Identification results are evaluated through experimental data in comparison with conventional frequency response method.

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System identification of anti-vibration units in semiconductor exposure apparatus

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Other

ASJC Scopus subject areas

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