Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film

J. H. Park, H. Y. Bae, Y. R. Oh, Yun Jae Kim, H. Y. Kim, Y. H. Huh

研究成果: Article

1 引用 (Scopus)

抄録

This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

元の言語English
ページ(範囲)478-484
ページ数7
ジャーナルMaterialwissenschaft und Werkstofftechnik
42
発行部数5
DOI
出版物ステータスPublished - 2011 1 1
外部発表Yes

Fingerprint

tensile tests
Platinum
platinum
Tensile strength
Thin films
tensile strength
thin films
test equipment
Elastic moduli
modulus of elasticity
Charge coupled devices
Delamination
Gages
Yield stress
Capacitance
yield strength
lead titanate zirconate
charge coupled devices
capacitance
Air

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

これを引用

Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film. / Park, J. H.; Bae, H. Y.; Oh, Y. R.; Kim, Yun Jae; Kim, H. Y.; Huh, Y. H.

:: Materialwissenschaft und Werkstofftechnik, 巻 42, 番号 5, 01.01.2011, p. 478-484.

研究成果: Article

Park, J. H. ; Bae, H. Y. ; Oh, Y. R. ; Kim, Yun Jae ; Kim, H. Y. ; Huh, Y. H. / Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film. :: Materialwissenschaft und Werkstofftechnik. 2011 ; 巻 42, 番号 5. pp. 478-484.
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abstract = "This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 {\^A}± 3.7, 75.0 {\^A}± 1.3, 73.3 {\^A}± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 {\^A}± 21.1, 238.6 {\^A}± 4.5, 221.1 {\^A}± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2{\%} offset yield strength could not be measured because the PZT/Pt thin film is very brittle.",
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T1 - Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film

AU - Park, J. H.

AU - Bae, H. Y.

AU - Oh, Y. R.

AU - Kim, Yun Jae

AU - Kim, H. Y.

AU - Huh, Y. H.

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N2 - This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

AB - This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

KW - dünne Blei-Zirkonat-Titanat (PZT) Schicht

KW - dünne Schicht

KW - elastischer Modul

KW - Mikrozugversuch

KW - Platin (Pt)

KW - Zugfestigkeit

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