The strain energy density of cubic epitaxial layers

D. J. Bottomley, P. Fons

研究成果: Article査読

19 被引用数 (Scopus)

抄録

We obtain a compact exact expression for the strain energy density of a cubic epitaxial medium in the limit of linear elasticity theory. Only the result for {001} is identical to the isotropic case: the greatest departure from isotropic theory occurs for {111}. We have evaluated this difference for a large number of cubic media and have obtained an estimate of its impact on epilayer critical thickness tc for [001] oriented growth. We suggest that it tends to lower tc for [001] oriented growth relative to that given by isotropic theory: by 15%-30% for common semiconductors and by up to a factor of 3 for metals.

本文言語English
ページ(範囲)406-412
ページ数7
ジャーナルJournal of Crystal Growth
160
3-4
DOI
出版ステータスPublished - 1996 3
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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