The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

T. Kitajima; M. Izawa; N. Nakano; T. Makabe

doi:10.1088/0022-3727/30/12/015

The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, N. Nakano, T. Makabe

常任理事

研究成果: Article › 査読

23 被引用数 (Scopus)

抄録

The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p₅ in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p₅) in Ar for 13.56 MHz.

本文言語	English
ページ（範囲）	1783-1789
ページ数	7
ジャーナル	Journal of Physics D: Applied Physics
巻	30
号	12
DOI	https://doi.org/10.1088/0022-3727/30/12/015
出版ステータス	Published - 1997 6月 21

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
音響学および超音波学
表面、皮膜および薄膜

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10.1088/0022-3727/30/12/015

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abstract = "The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p5 in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p5) in Ar for 13.56 MHz.",

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AU - Izawa, M.

AU - Nakano, N.

AU - Makabe, T.

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Y1 - 1997/6/21

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AB - The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p5 in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p5) in Ar for 13.56 MHz.

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The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

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