抄録
The temporal characteristics of 2D spatial images of the net excitation rate of argon 3p5 in a low-pressure capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by computer-assisted optical emission tomography for pressures ranging from 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism of the CCP are discussed on the basis of the absolute net excitation rate of Ar(3p5) in Ar for 13.56 MHz.
本文言語 | English |
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ページ(範囲) | 1783-1789 |
ページ数 | 7 |
ジャーナル | Journal of Physics D: Applied Physics |
巻 | 30 |
号 | 12 |
DOI | |
出版ステータス | Published - 1997 6月 21 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- 音響学および超音波学
- 表面、皮膜および薄膜