Thermochemical micro imprinting of single-crystal diamond surface using a nickel mold under high-pressure conditions

Yuji Imoto, Jiwang Yan

研究成果: Article査読

11 被引用数 (Scopus)

抄録

Single-crystal diamond is an important material for cutting tools, micro electro mechanical systems, optical devices, and semiconductor substrates. However, the techniques for producing microstructures on diamond surface with high efficiency and accuracy have not been established. This paper proposes a thermochemical imprinting method for transferring microstructures from a nickel (Ni) mold onto single-crystal diamond surface. The Ni mold was micro-structured by a nanoindenter and then pressed against the diamond surface under high temperature and pressure in argon atmosphere. Results show that microstructures on the Ni mold were successfully transferred onto the diamond surface, and their depth increased with both pressure and temperature. Laser micro-Raman spectroscopy, transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) analyses indicate that a graphite layer was formed over the contact area between diamond and Ni during pressing, and after washing by a mixed acid, the graphite layer could be completely removed. This study demonstrated the feasibility of a cost-efficient fabrication method for large-area microstructures on single-crystal diamond.

本文言語English
ページ(範囲)318-325
ページ数8
ジャーナルApplied Surface Science
404
DOI
出版ステータスPublished - 2017 5月 15

ASJC Scopus subject areas

  • 表面、皮膜および薄膜

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