Three dimensional optical emission tomography of an inductively coupled plasma

Akifumi Okigawa, Masahiro Tadokoro, Akihiko Itoh, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

研究成果: Article査読

48 被引用数 (Scopus)

抄録

The three dimensional distribution of the net production rate of excited species in an inductively coupled plasma (ICP) reactor in Ar has been measured as a function of pressure and discharge power. The ICP reactor is driven by a single turn radio-frequency current coil at 13.56 MHz. Robot assisted optical emission tomography was used in order to obtain radial profiles of emission at different distances from the coil thus giving effectively a three dimensional distribution of the net excitation rate as well as the number density of excited states. Under some conditions azimuthal symmetry of the discharge is broken mostly at higher pressures and higher powers. We have covered a range of pressures between 15 and 500mTorr and powers between 50 W and 400 W. The conditions for producing a uniform distribution of excited atoms as a representative of active species, are discussed.

本文言語English
ページ(範囲)4605-4616
ページ数12
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
7 SUPPL. B
DOI
出版ステータスPublished - 1997 7月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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