Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, Susumu Noda

研究成果: Conference contribution

抜粋

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ∼90% reflectance and ∼10dB attenuation around the photonic bandgap wavelength region.

元の言語English
ホスト出版物のタイトルConference on Lasers and Electro-Optics, 2007, CLEO 2007
DOI
出版物ステータスPublished - 2007 12 1
外部発表Yes
イベントConference on Lasers and Electro-Optics, 2007, CLEO 2007 - Baltimore, MD, United States
継続期間: 2007 5 62007 5 11

出版物シリーズ

名前Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Other

OtherConference on Lasers and Electro-Optics, 2007, CLEO 2007
United States
Baltimore, MD
期間07/5/607/5/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

フィンガープリント Three-dimensional photonic crystals fabricated by double-angled plasma etching' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Takahashi, S., Nakamori, T., Okano, M., Imada, M., & Noda, S. (2007). Three-dimensional photonic crystals fabricated by double-angled plasma etching. : Conference on Lasers and Electro-Optics, 2007, CLEO 2007 [4453246] (Conference on Lasers and Electro-Optics, 2007, CLEO 2007). https://doi.org/10.1109/CLEO.2007.4453246