Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, Susumu Noda

研究成果: Conference contribution

抄録

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ∼90% reflectance and ∼10dB attenuation around the photonic bandgap wavelength region.

本文言語English
ホスト出版物のタイトルConference on Lasers and Electro-Optics, 2007, CLEO 2007
DOI
出版ステータスPublished - 2007 12 1
外部発表はい
イベントConference on Lasers and Electro-Optics, 2007, CLEO 2007 - Baltimore, MD, United States
継続期間: 2007 5 62007 5 11

出版物シリーズ

名前Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Other

OtherConference on Lasers and Electro-Optics, 2007, CLEO 2007
CountryUnited States
CityBaltimore, MD
Period07/5/607/5/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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