Three-dimensional remarkable images of low-pressure H2 ICP in E-mode

Y. Miyoshi, M. Miyauchi, A. Oguni, T. Makabe

研究成果: Article

9 引用 (Scopus)

抜粋

Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H2 ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.

元の言語English
ページ(範囲)362-363
ページ数2
ジャーナルIEEE Transactions on Plasma Science
33
発行部数2 I
DOI
出版物ステータスPublished - 2005 4 1

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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