Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films synthesized by the AIP method

Hiroyuki Hasegawa, Ayako Kimura, Tetsuya Suzuki

研究成果: Article査読

46 被引用数 (Scopus)

抄録

Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were synthesized by changing the contents, x values, using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti(1-x)Al(x)N films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti(1-x)Cr(x)N and Ti(1-x)Zr(x)N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti(1-x)Al(x)N and Ti(1-x)Cr(x)N monotonously decreased from 4.23 Å (x = 0) down to 4.17 Å (x = 0.6) and to 4.16 Å (x = 1.0), respectively. On the other hand, the lattice parameters of Ti(1-x)Zr(x)N films monotonously increased from 4.23 Å (x = 0) up to 4.58 Å (x = 1.0). The maximum micro-hardness of Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.

本文言語English
ページ(範囲)76-79
ページ数4
ジャーナルSurface and Coatings Technology
132
1
DOI
出版ステータスPublished - 2000 10

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

フィンガープリント

「Ti(1-x)Al(x)N, Ti(1-x)Zr(x)N and Ti(1-x)Cr(x)N films synthesized by the AIP method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル