Time- and space-resolved spectroscopy of electron transport in low-frequency discharge plasma in argon

T. Makabe, M. Nakaya

研究成果: Article査読

15 被引用数 (Scopus)

抄録

The authors have observed the temporal and spatial profiles of optical emissions in low-frequency (100 kHz) discharge plasma at 1.0 Torr and 10 sccm in argon. Intermediate- and high-energy electron transport has been investigated by monitoring the emissions, Ar I (3p55p to 3p54s) and Ar II (3p44p to 3p44s), of the excited species with very short lifetimes compared with the external field period. It is emphasised that the power spectrum analysis of the emission intensity serves as an effective new method to investigate the plasma structure, i.e. the bulk and the sheath. Evidence is given that the electron in the bulk of plasma is driven only by the sinusoidal field with the same frequency as the external field. The metastable Ar(3P0,2) and the ion Ar+(2P 12,3/2/) are also investigated by using the second positive and the first negative emissions in the argon plasma with 0.1% of N2 added as a probe.

本文言語English
論文番号006
ページ(範囲)1243-1249
ページ数7
ジャーナルJournal of Physics D: Applied Physics
20
10
DOI
出版ステータスPublished - 1987 12 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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