## 抄録

The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH_{4}, H_{2} and their mixture by using the first three terms in Legendre polynomials with a fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields E_{R}/N in the range 15 to 70 Td and reduced angular frequencies omega/N in the range 10^{5}/N_{0} to 10^{10}/N_{0} cm^{2} s^{-1}, where N_{0} is the number density at 1 Torr and 273 K. The temporal modulation of the isotropic part of the velocity distribution is essentially determined by the ratio between omega ^{-1} and an energy relaxation time tau _{e}. It is shown that in molecular gases with rotational and vibrational collisions at very low energy, the asymptotic form of the energy distribution at very high frequency field differs from a Maxwellian as in atomic gases. The phenomenon of negative differential conductivity in CH_{4} has been studied as a parameter of omega/N. The gas mixture effect in an RF field is also discussed.

本文言語 | English |
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ページ（範囲） | 686-693 |

ページ数 | 8 |

ジャーナル | Journal of Physics D: Applied Physics |

巻 | 23 |

号 | 6 |

DOI | |

出版ステータス | Published - 1990 6 14 |

## ASJC Scopus subject areas

- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films