## 抄録

The temporal behaviour of electron swarm transport in an RF field has been investigated for the electron non-conservative case in CH_{4}, H_{2} and their mixture by using the first three terms in Legendre polynomials with a fourier expansion in time for the electron velocity distribution from the time-dependent Boltzmann equation. Calculations have been made for reduced RMS electric fields E_{R}/N in the range 15 to 70 Td and reduced angular frequencies omega/N in the range 10^{5}/N_{0} to 10^{10}/N_{0} cm^{2} s^{-1}, where N_{0} is the number density at 1 Torr and 273 K. The temporal modulation of the isotropic part of the velocity distribution is essentially determined by the ratio between omega ^{-1} and an energy relaxation time tau _{e}. It is shown that in molecular gases with rotational and vibrational collisions at very low energy, the asymptotic form of the energy distribution at very high frequency field differs from a Maxwellian as in atomic gases. The phenomenon of negative differential conductivity in CH_{4} has been studied as a parameter of omega/N. The gas mixture effect in an RF field is also discussed.

本文言語 | English |
---|---|

ページ（範囲） | 686-693 |

ページ数 | 8 |

ジャーナル | Journal of Physics D: Applied Physics |

巻 | 23 |

号 | 6 |

DOI | |

出版ステータス | Published - 1990 6月 14 |

## ASJC Scopus subject areas

- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- 音響学および超音波学
- 表面、皮膜および薄膜

## フィンガープリント

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