Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation

Kenji Maeda, Toshiaki Makabe

研究成果: Article査読

38 被引用数 (Scopus)

抄録

Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.

本文言語English
ページ(範囲)4173
ページ数1
ジャーナルJapanese journal of applied physics
33
7S
DOI
出版ステータスPublished - 1994 7月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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