Towards nanostructuring with femtosecond laser pulses

Jürgen Koch, Takasumi Tanabe, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris N. Chichkov

    研究成果: Conference article査読

    1 被引用数 (Scopus)

    抄録

    Micro- and nanostructuring are very important for the fabrication of new materials and multifunctional devices. Existing photo-lithographic technologies can only be applied to a limited number of materials and used on plane surfaces. Whereas, microstructuring with femtosecond laser pulses has established itself as an excellent and universal tool for micro-processing, it is still unclear what are the limits of this technology. It is of great interest to use this technique also for nanostructuring. With tightly focused femtosecond laser pulses one can produce sub-micrometer holes and structures whose quality depends on the material. We present new results on nanostructuring of different materials with femtosecond laser pulses in an attempt to make this an universal technology, and discuss its reproducibility, and further prospects for quality control.

    本文言語English
    論文番号118
    ページ(範囲)743-748
    ページ数6
    ジャーナルProceedings of SPIE - The International Society for Optical Engineering
    5662
    DOI
    出版ステータスPublished - 2004 12月 1
    イベントFifth International Symposium on Laser Precision Microfabrication - Nara, Japan
    継続期間: 2004 5月 112004 5月 14

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 凝縮系物理学
    • コンピュータ サイエンスの応用
    • 応用数学
    • 電子工学および電気工学

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