Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Y. Miyoshi, Z. Lj Petrović, T. Makabe

研究成果: Article査読

26 被引用数 (Scopus)

抄録

Optical emission spectroscopy is used together with computerized tomography to describe the transition between the capacitively coupled (E) mode and inductively coupled (H) mode in an inductively coupled plasma reactor. Previous studies of the transition and minimum sustaining conditions were based mainly on measurements of electrical characteristics. In this paper, we show how two-dimensional maps of emission may improve understanding of the mechanisms that control the two modes and the transition.

本文言語English
ページ(範囲)130-131
ページ数2
ジャーナルIEEE Transactions on Plasma Science
30
1 I
DOI
出版ステータスPublished - 2002 2月
外部発表はい

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 凝縮系物理学

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