抄録
We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.
本文言語 | English |
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ページ(範囲) | 3560-3565 |
ページ数 | 6 |
ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
巻 | 46 |
号 | 6 A |
DOI | |
出版ステータス | Published - 2007 6月 6 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)