抄録
We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 3560-3565 |
| ページ数 | 6 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 46 |
| 号 | 6 A |
| DOI | |
| 出版ステータス | Published - 2007 6月 6 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 工学（全般）
- 物理学および天文学（全般）