Transport coefficients for electrons in mixtures of Ar and HBr

Olivera Šašić, Saša Dujko, Zoran Lj Petrović, Toshiaki Makabe

研究成果: Article査読

15 被引用数 (Scopus)

抄録

We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.

本文言語English
ページ(範囲)3560-3565
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
6 A
DOI
出版ステータスPublished - 2007 6月 6
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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