Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.

本文言語English
ホスト出版物のタイトルMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1221-1224
ページ数4
ISBN(印刷版)9781479935086
DOI
出版ステータスPublished - 2014 1 1
外部発表はい
イベント27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
継続期間: 2014 1 262014 1 30

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域United States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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