Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array

Nguyen Thanh-Vinh, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

18 被引用数 (Scopus)

抄録

Abstract In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 μL water droplet on the micropillar array.

本文言語English
論文番号8900
ページ(範囲)35-43
ページ数9
ジャーナルSensors and Actuators, A: Physical
231
DOI
出版ステータスPublished - 2015 8 11
外部発表はい

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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