Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy

H. Ra, Y. Taguchi, D. Lee, W. Piyawattanametha, O. Solgaard

研究成果: Conference contribution

25 引用 (Scopus)

抜粋

This paper presents a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. A gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The imaging capability of the MEMS mirror is successfully demonstrated in a breadboard setup. Reflectance images with a field of view (FOV) of 344 μm × 417 μm are achieved at 8 frames per second. The transverse resolution is 3.94 μm and 6.68 μm for the horizontal and vertical dimensions, respectively.

元の言語English
ホスト出版物のタイトル19th IEEE International Conference on Micro Electro Mechanical Systems
ページ862-865
ページ数4
出版物ステータスPublished - 2006 10 24
外部発表Yes
イベント19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
継続期間: 2006 1 222006 1 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(印刷物)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
Turkey
Istanbul
期間06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • これを引用

    Ra, H., Taguchi, Y., Lee, D., Piyawattanametha, W., & Solgaard, O. (2006). Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy. : 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 862-865). [1627936] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 巻数 2006).