Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy

H. Ra, Y. Taguchi, D. Lee, W. Piyawattanametha, O. Solgaard

研究成果: Conference contribution

25 被引用数 (Scopus)

抄録

This paper presents a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. A gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The imaging capability of the MEMS mirror is successfully demonstrated in a breadboard setup. Reflectance images with a field of view (FOV) of 344 μm × 417 μm are achieved at 8 frames per second. The transverse resolution is 3.94 μm and 6.68 μm for the horizontal and vertical dimensions, respectively.

本文言語English
ホスト出版物のタイトル19th IEEE International Conference on Micro Electro Mechanical Systems
ページ862-865
ページ数4
出版ステータスPublished - 2006 10月 24
外部発表はい
イベント19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
継続期間: 2006 1月 222006 1月 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(印刷版)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
国/地域Turkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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