Two-dimensional modeling of a microcell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source

Masaru Kurihara, Toshiaki Makabe

研究成果: Article査読

17 被引用数 (Scopus)

抄録

The basic characteristics of a micro-cell plasma in a gas mixture sustained by a high-frequency voltage source with a ring-shaped electrode are described in this article. The key to maintaining a microcell plasma is to reduce wall loss and increase plasma production. The advantage of a gas mixture of Ne/Xe is the increase of the plasma production rate in a low electric field compared to that in pure gas. As a result, a microcell plasma can be sustained by a lower applied voltage by using a gas mixture of Ne/Xe under the same power condition as compared with that in pure Xe.

本文言語English
ページ(範囲)7756-7763
ページ数8
ジャーナルJournal of Applied Physics
89
12
DOI
出版ステータスPublished - 2001 6 1

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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