TY - JOUR
T1 - Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma
AU - Kamimura, Kazuhiro
AU - Iyanagi, Katumi
AU - Nakano, Nobuhiko
AU - Makabe, Toshiaki
PY - 1999/7
Y1 - 1999/7
N2 - An inductively coupled plasma (ICP) is one of the candidates for a high density, large area and uniform plasma source for use in plasma processing even under low pressure conditions. We have developed a two-dimensional and time dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a current amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma density of 1011 cm-3 is clarified as well as a potential distribution of the insulating wall of ICP. The importance of the power deposition by E1 × Bz drift of electrons in front of the side wall, in addition to E0 drift is pointed out in terms of the plasma maintenance.
AB - An inductively coupled plasma (ICP) is one of the candidates for a high density, large area and uniform plasma source for use in plasma processing even under low pressure conditions. We have developed a two-dimensional and time dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a current amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma density of 1011 cm-3 is clarified as well as a potential distribution of the insulating wall of ICP. The importance of the power deposition by E1 × Bz drift of electrons in front of the side wall, in addition to E0 drift is pointed out in terms of the plasma maintenance.
UR - http://www.scopus.com/inward/record.url?scp=0033157903&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033157903&partnerID=8YFLogxK
U2 - 10.1143/jjap.38.4429
DO - 10.1143/jjap.38.4429
M3 - Article
AN - SCOPUS:0033157903
VL - 38
SP - 4429
EP - 4435
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 B
ER -