Two-dimensional self-consistent simulation of a DC magnetron discharge

Eiji Shidoji, Hiroto Ohtake, Nobuhiko Nakano, Toshiaki Makabe

研究成果: Article査読

3 被引用数 (Scopus)

抄録

A two-dimensional simulation of dc magnetron discharge is performed by a hybrid of fluid and particle models. In this hybrid model, ions and bulk electrons are treated by the fluid model and fast electrons are treated by the particle model. The numerical results indicate that the number density of the fast electrons has little effect on the electric field distribution in dc magnetron discharge at 30 mTorr since the ratio of fast electrons to bulk electrons is quite low. The transport of fast electrons is, however, quite important for dc discharge because the spatial distribution of the net ionization rate is subject to the spatial behavior of the fast electrons.

本文言語English
ページ(範囲)2124-2130
ページ数7
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
38
4 A
出版ステータスPublished - 1999

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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