Two orders agreement between stiffness measurement of µ-scale beam with analytical, macroscopic predictions

Takaaki Sato, Gen Hashiguchi, Hiroyuki Fujita

研究成果: Article査読

抄録

Miniaturization technology for creating three-dimensional structures is constantly advancing, reaching a processing accuracy of several µm. Therefore, it is questionable whether it is possible to obtain the stiffness of spring constant derived from macroscopic bending model and from macroscale parameters such as Young's modulus in this small region. To test the goodness of the macroscale model, we fabricated a micro-scale beam and an electrostatic actuator, applied an AC voltage to make the beam resonate, and measured the resonant frequency of the beam. The resonance frequencies were measured through changes in bias voltage. By the constant voltage dependence of the resonance frequency, we measured the soft-spring effect, and also measured the stiffness spring constant of the beam without the soft-spring effect. We demonstrate that the stiffness of a beam of a few µm can be accurately calculated from the macroscale analytical solution if the beam dimensions are known.

本文言語English
論文番号113448
ジャーナルSensors and Actuators A: Physical
337
DOI
出版ステータスPublished - 2022 4月 16
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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