Ultra-precision cryogenic machining of viscoelastic polymers

研究成果: Article査読

30 被引用数 (Scopus)

抄録

Microfluidic chips with micro- or nanoscale channels are currently in great demand. PDMS (polydimethylsiloxane), a viscoelastic polymer, has high transparency and good chemical stability, making it a suitable substrate material for such chips. However, it is difficult to machine PDMS by conventional cutting processes because of its high elasticity and adhesion. We proposed the cryogenic micromachining of PDMS completely immersed in liquid nitrogen as a direct process to fabricate customized 3D nano/microfluidic chips precisely. In this study, the feasibility of ultra-precision cryogenic machining is studied as an extended nanofabrication process.

本文言語English
ページ(範囲)79-82
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
61
1
DOI
出版ステータスPublished - 2012

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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