TY - JOUR
T1 - Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene
AU - Ito, Kazuyuki
AU - Ogata, Takamasa
AU - Sakai, Tadashi
AU - Awano, Yuji
N1 - Publisher Copyright:
© 2015 The Japan Society of Applied Physics
PY - 2015/2/1
Y1 - 2015/2/1
N2 - The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10-8 Ω cm2 by thermal annealing at 450 ° C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.
AB - The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10-8 Ω cm2 by thermal annealing at 450 ° C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.
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U2 - 10.7567/APEX.8.025101
DO - 10.7567/APEX.8.025101
M3 - Article
AN - SCOPUS:84922375402
VL - 8
SP - 25101
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 2
ER -