Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene

Kazuyuki Ito, Takamasa Ogata, Tadashi Sakai, Yuji Awano

    研究成果: Article査読

    9 被引用数 (Scopus)

    抄録

    The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10-8 Ω cm2 by thermal annealing at 450 ° C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.

    本文言語English
    ページ(範囲)25101
    ページ数1
    ジャーナルApplied Physics Express
    8
    2
    DOI
    出版ステータスPublished - 2015 2 1

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

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