The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10-8 Ω cm2 by thermal annealing at 450 ° C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.
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