Ultraviolet and vacuum-ultraviolet laser ablation of organic polymers

Tsuneo Nakata, Fumihiko Kannari, Minoru Obara

    研究成果: Article査読

    7 被引用数 (Scopus)

    抄録

    We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.

    本文言語English
    ページ(範囲)179-190
    ページ数12
    ジャーナルOptoelectronics Tokyo
    8
    2
    出版ステータスPublished - 1993 6 1

    ASJC Scopus subject areas

    • 工学(全般)

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