We present our recent experimental results concerning the ultraviolet (UV) and vacuum-ultraviolet (VUV) laser ablation of organic polymers. The mechanism of microstructure formation on ablated polyethylene terephthalate (PET) was studied. A polytetrafluoroethylene film was successfully etched by a VUV F2 laser, and electrical conductivity was induced on a polyimide film by F2 laser irradiation.
|出版ステータス||Published - 1993 6 1|
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