Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Hiroaki Imai, Atsushi Tominaga, Hiroshi Hirashima, Motoyuki Toki, Mamoru Aizawa

研究成果: Article

35 引用 (Scopus)

抄録

Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

元の言語English
ページ(範囲)991-994
ページ数4
ジャーナルJournal of Sol-Gel Science and Technology
13
発行部数1-3
出版物ステータスPublished - 1999

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Ultraviolet lasers
Crystallization
ultraviolet lasers
indium oxides
Indium
Oxide films
Sol-gels
oxide films
fluence
gels
crystallization
irradiation
Sheet resistance
Laser beam effects
excimers
Harmonic generation
Hydroxyl Radical
YAG lasers
harmonic generations
Irradiation

ASJC Scopus subject areas

  • Ceramics and Composites

これを引用

Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films. / Imai, Hiroaki; Tominaga, Atsushi; Hirashima, Hiroshi; Toki, Motoyuki; Aizawa, Mamoru.

:: Journal of Sol-Gel Science and Technology, 巻 13, 番号 1-3, 1999, p. 991-994.

研究成果: Article

Imai, H, Tominaga, A, Hirashima, H, Toki, M & Aizawa, M 1999, 'Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films', Journal of Sol-Gel Science and Technology, 巻. 13, 番号 1-3, pp. 991-994.
Imai, Hiroaki ; Tominaga, Atsushi ; Hirashima, Hiroshi ; Toki, Motoyuki ; Aizawa, Mamoru. / Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films. :: Journal of Sol-Gel Science and Technology. 1999 ; 巻 13, 番号 1-3. pp. 991-994.
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AU - Tominaga, Atsushi

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AU - Toki, Motoyuki

AU - Aizawa, Mamoru

PY - 1999

Y1 - 1999

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KW - Indium oxide

KW - ITO

KW - Sol-gel

KW - Ultraviolet laser

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