Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Hiroaki Imai, Atsushi Tominaga, Hiroshi Hirashima, Motoyuki Toki, Mamoru Aizawa

研究成果: Article査読

38 被引用数 (Scopus)

抄録

Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

本文言語English
ページ(範囲)991-994
ページ数4
ジャーナルJournal of Sol-Gel Science and Technology
13
1-3
出版ステータスPublished - 1998 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • セラミックおよび複合材料
  • 化学 (全般)
  • 生体材料
  • 凝縮系物理学
  • 材料化学

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