Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

Jim Taniguchi, Iwao Miyamoto, Naoto Ohno, Satoshi Honda

研究成果: Article査読

11 被引用数 (Scopus)

抄録

Electron beam assisted chemical etching (EBACE) with oxygen gas is not applicable for direct fine patterning of diamond devices, because the diamond is an electrical insulator and electron beam impingement of the diamond causes the surface charge-up. It is possible to form conductive layer of hydrocarbon on the diamond surface by electron beam irradiation in the atmosphere of diffusion pump oil vapors. In this paper, a scanning electron microscope (SEM) combined with oxygen gas introduction system was used for EBACE of the diamond. It was found by in-situ SEM observation that rectangular patterns with several μm2 area and sub-μm depth were formed on the diamond chip.

本文言語English
ページ(範囲)507-509
ページ数3
ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
121
1-4
DOI
出版ステータスPublished - 1997 1

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

フィンガープリント 「Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル