UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

Ryotaro Mori, Yoshinori Matsumoto

研究成果: Article査読

5 被引用数 (Scopus)

抄録

Emulsion gray-scale masks were fabricated using three types of ink-jet printers and a 1/20 projector. Scanner was used to measure the light transparency of the printed transparency sheets and emulsion gray-scale mask. Power of UV light was measured with UV power meter especially for the wavelength of 313[nm] in which photosensitive glass absorbs well. The UV light transparency of emulsion gray-scale mask was measured with UV power meter, and the effect for the etching depth of photo sensitive glass was discussed in this paper. Then, photosensitive glass was processed by the mask and deep UV light source, and the relationship between etching depth and gray-scale value was measured. From the result, characteristics emulsion gray-scale mask of were unveiled for 3-D micro machining of photosensitive glass.

本文言語English
ページ(範囲)499-503
ページ数5
ジャーナルieej transactions on sensors and micromachines
123
11
DOI
出版ステータスPublished - 2003

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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