UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

Ryotaro Mori, Yoshinori Matsumoto

研究成果: Article

5 引用 (Scopus)

抄録

Emulsion gray-scale masks were fabricated using three types of ink-jet printers and a 1/20 projector. Scanner was used to measure the light transparency of the printed transparency sheets and emulsion gray-scale mask. Power of UV light was measured with UV power meter especially for the wavelength of 313[nm] in which photosensitive glass absorbs well. The UV light transparency of emulsion gray-scale mask was measured with UV power meter, and the effect for the etching depth of photo sensitive glass was discussed in this paper. Then, photosensitive glass was processed by the mask and deep UV light source, and the relationship between etching depth and gray-scale value was measured. From the result, characteristics emulsion gray-scale mask of were unveiled for 3-D micro machining of photosensitive glass.

元の言語English
ページ(範囲)499-503
ページ数5
ジャーナルIEEJ Transactions on Sensors and Micromachines
123
発行部数11
DOI
出版物ステータスPublished - 2003

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Photosensitive glass
Transparency
Emulsions
Masks
Machining
Ultraviolet radiation
Etching
Ink jet printers
Ultraviolet Rays
Wavelength

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

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