Vertical and longitudinal multilayer graphene growth using novel heat-beam-assisted chemical vapor deposition

Kazuyuki Ito, Ryosuke Sawabe, Yuji Awano

    研究成果: Article査読

    1 被引用数 (Scopus)

    抄録

    A vertical and longitudinal multilayer graphene sheet was grown on a substrate by catalytic chemical vapor deposition (CVD). For the CVD, we used a novel annealing method called "heat beam (HB)", in which high-temperature inert gas is blown directly onto the chip surface in an inertgas- flow chamber, and a safe and chemically stable " diethylacetylene" as a hydrocarbon source. The advantages of HB-CVD include not only a steep temperature-depth profile but also better scalability for mass production, such as with roll-to-roll systems. We investigate the crystalline quality and structure of HB-CVD-grown graphene by Raman spectroscopy and transmission electron microscopy.

    本文言語English
    論文番号115101
    ジャーナルApplied Physics Express
    6
    11
    DOI
    出版ステータスPublished - 2013 11 1

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

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