Visualization of acoustic waves and cavitation in ultrasonic water flow

Hidehisa Usui, Tomoatsu Ishibashi, Hisanori Matsuo, Katsuhide Watanabe, Keita Ando

研究成果: Conference contribution

抄録

Visualization experiments were performed to examine whether acoustic bubbles play a role in ultrasonic water flow cleaning, as in convention cleaning with ultrasonic baths. Schlieren visualization confirmed the standing-wave-like acoustic field in ultrasonic water flow that collides with a glass surface. Backlight visualization showed that cavitation bubbles appear in the water flow spreading over the glass surface. These bubbles are found to oscillate in volume and move inside film flow and thus expected to play a role as active cleaning agents.

本文言語English
ホスト出版物のタイトルUltra Clean Processing of Semiconductor Surfaces XV - Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
編集者Paul W. Mertens, Kurt Wostyn, Marc Meuris, Marc Heyns
出版社Trans Tech Publications Ltd
ページ186-191
ページ数6
ISBN(印刷版)9783035738018
DOI
出版ステータスPublished - 2021
イベント15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021 - Mechelen, Belgium
継続期間: 2021 4 122021 4 15

出版物シリーズ

名前Solid State Phenomena
314 SSP
ISSN(印刷版)1012-0394
ISSN(電子版)1662-9779

Conference

Conference15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021
CountryBelgium
CityMechelen
Period21/4/1221/4/15

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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