Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array

Hidetoshi Takahashi, Isao Shimoyama

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.

本文言語English
ホスト出版物のタイトル2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版社Institute of Electrical and Electronics Engineers Inc.
ページ214-217
ページ数4
ISBN(電子版)9781538647820
DOI
出版ステータスPublished - 2018 4 24
外部発表はい
イベント31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
継続期間: 2018 1 212018 1 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018-January
ISSN(印刷版)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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